Our ultra
high vacuum chambers are available in a variety
of standard configurations. We can also
manufacture vacuum chambers that meet specific
technical and performance requirements, based
on a client's specialized needs and input.
Each
vacuum chamber manufactured by Johnsen
Ultravac is
produced to the highest standards. Particular
attention is given to eliminate any possibility
of virtual leaks. This results in vacuum performance
to 10-11 Torr range. Each chamber body is carefully
milled to very close tolerances to ensure proper
port alignment. We employ special machining fluids
to avoid contamination of the base materials. Upon
completion of the machining, all parts are cleaned
for welding and the vessel is checked for leaks
in
a "clean room" environment. Critical
port alignment is inspected again and then certified
before
final cleaning and packaging.
Vacuum Chamber Technical Data:
- every
chamber leak checked to 2x10-10atm cc/sec.
- 0.5%
port alignment
- glass shot finish
- seven step cleaning
process
Options:
- mu-metal liners for magnetic
shielding
- stainless steel liners for deposition
systems
- electro polish finish
- water cooling
- cryo shrouds
JUV UHV Chamber—Manufacturing Procedures
Download PDF Data Sheet |
